Manual Rev 1, July 14 POWER CABLE The therMOstat has a C13 IEC filtered power inlet on the back of the unit. This can connect to a various amount of connectors, such as C20 plug for Veeco systems, the custom Aixtron connector, or even an American NEMA plug. Figure Veeco C13 to C20 plug FILL CANISTERFile Size: 1MB. CCS-FT 3x2 inch. Flexible lab-scale system. Featuring Close Coupled Showerhead (CCS) technology in a flip top (FT) chamber. Wafer capacity: 3x2, 1x3 or 1x4. Heater temperature options: C / C / C / C. Up to 12 metalorganic 7 hydride gas channels, active differential pressure control. 1 STANDARD OPERATING PROCEDURE AIXTRON (formerly NanoInstruments) Carbon Nanotube Deposition System CORAL Name: CCNT Model Number: Black Magic Pro Location: a TRL What it does: Plasma Enhanced Chemical Vapor Deposition (PECVD) of Carbon Nanotubes (CNTs) Figure 1. The TRL PECVD CNT Reactor (CCNT) INTRODUCTION.
AIXTRON 24/7 Technical Support Line Phone: +49 () AIXTRON Europe. 11 MOCVD Manual v Controls for each source input are organized in individual blocks on the reactor front panel. During manual operation, the operator's attention is thus focused on one block at a time minimizing the possibility of error. Design Review Certificate MOCVD Rev/ / Release: www.doorway.ru page 7 of 24 General Support Requirements • During the commissioning and start-up, the customer shall not interfere with the AIXTRON hardware unless in direct cooperation with the AIXTRON Group engineer (for training purposes or direct support).
by Aixtron SE, of a particular type called planetary; two different models The chamber ceiling can be opened for manual loading/unloading of wafers. MO Used:TMI, TMA, TMG, DMZ; Johnson Matthey Hydrogen Purifier; PC controller (Confirmed functional); Leybold Trivac Pump, D65BCS; System Manual (hard copy). EpiCurve® TT Two for AIXTRON Planetary® MOCVD - Laytec. direct communication with AIXTRON CACE and AIXact software manual and software CD.
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