Aja sputtering system manual

A cryopumped sputter deposition system allows deposition of a variety of metals and dielectrics. A full target list is available below. Both RF and DC sputtering is available on this system. This is a single wafer load-lock tool capable of accommodating up to 6 inch wafers. With rotation during deposition, less than 1% uniformity is encountered. AJA ORION SPUTTER SYSTEM. Figure 1: AJA Orion Sputter System. Introduction. AJA Orion Sputter System deposits metal as well as dielectric films over a substrate up to 6” in diameter. It is fitted with three 3” diameter sputter guns that are poweredby RF, DC, and pulse sources and can be used for single or multi-layer deposition. Figure 1: Sputter II - AJA Orion Sputter System. Introduction. AJA Orion Sputter System deposits metal as well as dielectric films over a substrate up to 6” in diameter. It is fitted with two 3” diameter sputter guns; one that is powered by RF, and one by pulsedDC, and can be - used for single or multi -layer deposition. The system.

Sections of this document present a sequential, “MANUAL” procedure to deposit thin films with your AJA International, Inc. ATC Series Sputtering System. If you have purchased computer control, it is nonetheless recommended that a few initial runs are made operating the system in the computer’s “manual mode” to. Sections of this document present a sequential, “MANUAL” procedure to deposit thin films with your AJA International, Inc. ATC Series Sputtering System. If you have purchased computer control, it is nonetheless. This document describes operational and maintenance procedures for the AJA Magnetron Sputter System; UTD Cleanroom Tool ID: MS This tool is used to deposit metallic and insulating films (i.e. Aluminum, Nickel, Titanium, SiO2) onto a substrate material such as Silicon by sputtering from up to four target materials. Scope.

Deposition – Manual (One Target Deposition). The AJA Sputter System is a load-locked sputtering system capable of depositing metal and. 1 About; 2 Detailed Specifications; 3 Documentation; 4 Materials Table. About. The Six-Target DC/RF Sputtering System, built by AJA. Motorized, rotating substrate holder for 3” substrates with in-situ manual Z motion. Substrate holder featuring reactive gas injection rings, RF bias capability.